JPH0481337B2 - - Google Patents

Info

Publication number
JPH0481337B2
JPH0481337B2 JP57164840A JP16484082A JPH0481337B2 JP H0481337 B2 JPH0481337 B2 JP H0481337B2 JP 57164840 A JP57164840 A JP 57164840A JP 16484082 A JP16484082 A JP 16484082A JP H0481337 B2 JPH0481337 B2 JP H0481337B2
Authority
JP
Japan
Prior art keywords
type
oxide film
semiconductor
main surface
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57164840A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5955052A (ja
Inventor
Norio Anzai
Hideki Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57164840A priority Critical patent/JPS5955052A/ja
Priority to FR8309953A priority patent/FR2533751B1/fr
Priority to KR1019830003011A priority patent/KR920001403B1/ko
Priority to GB08324163A priority patent/GB2128024B/en
Priority to US06/531,708 priority patent/US4529456A/en
Priority to DE19833334337 priority patent/DE3334337A1/de
Priority to IT22983/83A priority patent/IT1168294B/it
Publication of JPS5955052A publication Critical patent/JPS5955052A/ja
Priority to SG368/87A priority patent/SG36887G/en
Priority to HK710/87A priority patent/HK71087A/xx
Priority to MY610/87A priority patent/MY8700610A/xx
Publication of JPH0481337B2 publication Critical patent/JPH0481337B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02579—P-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0107—Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs
    • H10D84/0109—Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs the at least one component covered by H10D12/00 or H10D30/00 being a MOS device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
JP57164840A 1982-09-24 1982-09-24 半導体集積回路装置の製造方法 Granted JPS5955052A (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP57164840A JPS5955052A (ja) 1982-09-24 1982-09-24 半導体集積回路装置の製造方法
FR8309953A FR2533751B1 (fr) 1982-09-24 1983-06-16 Procede de fabrication d'un dispositif a circuit integre dans lequel les mosfet sont formes dans un corps semiconducteur identique
KR1019830003011A KR920001403B1 (ko) 1982-09-24 1983-07-01 반도체집적회로장치의 제조방법
GB08324163A GB2128024B (en) 1982-09-24 1983-09-09 Method of manufacturing semiconductor integrated circuit device
US06/531,708 US4529456A (en) 1982-09-24 1983-09-13 Method of forming bifets by forming isolation regions connected by diffusion in semiconductor substrate and epitaxial layer
DE19833334337 DE3334337A1 (de) 1982-09-24 1983-09-22 Verfahren zur herstellung einer integrierten halbleitereinrichtung
IT22983/83A IT1168294B (it) 1982-09-24 1983-09-23 Procedimento per fabbricare un dispositivo a circuito integrato a semiconduttori
SG368/87A SG36887G (en) 1982-09-24 1987-04-23 Method of manufacturing semiconductor integrated circuit device
HK710/87A HK71087A (en) 1982-09-24 1987-10-01 Method of manufacturing semiconductor integrated circuit device
MY610/87A MY8700610A (en) 1982-09-24 1987-12-30 Method of manufacturing semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57164840A JPS5955052A (ja) 1982-09-24 1982-09-24 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5955052A JPS5955052A (ja) 1984-03-29
JPH0481337B2 true JPH0481337B2 (en]) 1992-12-22

Family

ID=15800917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57164840A Granted JPS5955052A (ja) 1982-09-24 1982-09-24 半導体集積回路装置の製造方法

Country Status (10)

Country Link
US (1) US4529456A (en])
JP (1) JPS5955052A (en])
KR (1) KR920001403B1 (en])
DE (1) DE3334337A1 (en])
FR (1) FR2533751B1 (en])
GB (1) GB2128024B (en])
HK (1) HK71087A (en])
IT (1) IT1168294B (en])
MY (1) MY8700610A (en])
SG (1) SG36887G (en])

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931052A (ja) * 1982-08-13 1984-02-18 Hitachi Ltd 半導体集積回路装置の製造方法
JPS5994861A (ja) * 1982-11-24 1984-05-31 Hitachi Ltd 半導体集積回路装置及びその製造方法
US4637125A (en) * 1983-09-22 1987-01-20 Kabushiki Kaisha Toshiba Method for making a semiconductor integrated device including bipolar transistor and CMOS transistor
US4536945A (en) * 1983-11-02 1985-08-27 National Semiconductor Corporation Process for producing CMOS structures with Schottky bipolar transistors
DE3402653A1 (de) * 1984-01-26 1985-08-01 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung speziell dotierter bereiche in halbleitermaterial
JPS60217657A (ja) * 1984-04-12 1985-10-31 Mitsubishi Electric Corp 半導体集積回路装置の製造方法
ATE59917T1 (de) * 1985-09-13 1991-01-15 Siemens Ag Integrierte bipolar- und komplementaere mostransistoren auf einem gemeinsamen substrat enthaltende schaltung und verfahren zu ihrer herstellung.
US6740958B2 (en) * 1985-09-25 2004-05-25 Renesas Technology Corp. Semiconductor memory device
US4797372A (en) * 1985-11-01 1989-01-10 Texas Instruments Incorporated Method of making a merge bipolar and complementary metal oxide semiconductor transistor device
US4963951A (en) * 1985-11-29 1990-10-16 General Electric Company Lateral insulated gate bipolar transistors with improved latch-up immunity
EP0248988B1 (de) * 1986-06-10 1990-10-31 Siemens Aktiengesellschaft Verfahren zum Herstellen von hochintegrierten komplementären MOS-Feldeffekttransistorschaltungen
JPH0797610B2 (ja) * 1986-06-18 1995-10-18 松下電子工業株式会社 Ｂｉ−ＣＭＯＳ集積回路
JPH0797609B2 (ja) * 1986-06-18 1995-10-18 松下電子工業株式会社 相補型ｍｉｓ集積回路
EP0250721B1 (de) * 1986-07-04 1993-09-15 Siemens Aktiengesellschaft Integrierte Bipolar- und komplementäre MOS-Transistoren auf einem gemeinsamen Substrat enthaltende Schaltung und Verfahren zu ihrer Herstellung
US4727046A (en) * 1986-07-16 1988-02-23 Fairchild Semiconductor Corporation Method of fabricating high performance BiCMOS structures having poly emitters and silicided bases
JP2635961B2 (ja) * 1986-09-26 1997-07-30 株式会社日立製作所 半導体装置の製造方法
US5023690A (en) * 1986-10-24 1991-06-11 Texas Instruments Incorporated Merged bipolar and complementary metal oxide semiconductor transistor device
JPS6410644A (en) * 1987-07-02 1989-01-13 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS6437860A (en) * 1987-08-03 1989-02-08 Fujitsu Ltd Manufacture of bi-cmos semiconductor device
US5132235A (en) * 1987-08-07 1992-07-21 Siliconix Incorporated Method for fabricating a high voltage MOS transistor
US4958213A (en) * 1987-12-07 1990-09-18 Texas Instruments Incorporated Method for forming a transistor base region under thick oxide
US5011784A (en) * 1988-01-21 1991-04-30 Exar Corporation Method of making a complementary BiCMOS process with isolated vertical PNP transistors
US5075241A (en) * 1988-01-29 1991-12-24 Texas Instruments Incorporated Method of forming a recessed contact bipolar transistor and field effect device
US5293077A (en) * 1988-02-29 1994-03-08 Hitachi, Ltd. Power switching circuit
EP0405045B1 (en) * 1989-06-28 1995-12-13 STMicroelectronics S.r.l. A mixed technology integrated circuit comprising CMOS structures and efficient lateral bipolar transistors with a high early voltage and fabrication thereof
US5171702A (en) * 1989-07-21 1992-12-15 Texas Instruments Incorporated Method for forming a thick base oxide in a BiCMOS process
US5124271A (en) * 1990-06-20 1992-06-23 Texas Instruments Incorporated Process for fabricating a BiCMOS integrated circuit
US5013671A (en) * 1990-06-20 1991-05-07 Texas Instruments Incorporated Process for reduced emitter-base capacitance in bipolar transistor
GB9112783D0 (en) * 1991-06-13 1991-07-31 Cmb Foodcan Plc Can ends
US5248624A (en) * 1991-08-23 1993-09-28 Exar Corporation Method of making isolated vertical pnp transistor in a complementary bicmos process with eeprom memory
US5648281A (en) * 1992-09-21 1997-07-15 Siliconix Incorporated Method for forming an isolation structure and a bipolar transistor on a semiconductor substrate
US5422508A (en) * 1992-09-21 1995-06-06 Siliconix Incorporated BiCDMOS structure
US5698884A (en) * 1996-02-07 1997-12-16 Thunderbird Technologies, Inc. Short channel fermi-threshold field effect transistors including drain field termination region and methods of fabricating same
US5843814A (en) * 1996-02-15 1998-12-01 Micron Technology, Inc. Method of forming BiCMOS circuitry
US6133123A (en) * 1997-08-21 2000-10-17 Micron Technology, Inc. Fabrication of semiconductor gettering structures by ion implantation
KR100350648B1 (ko) * 2000-01-17 2002-08-28 페어차일드코리아반도체 주식회사 모스 트랜지스터 및 그 제조 방법
US6528850B1 (en) * 2000-05-03 2003-03-04 Linear Technology Corporation High voltage MOS transistor with up-retro well
JP2003017603A (ja) 2001-06-28 2003-01-17 Mitsubishi Electric Corp 半導体装置およびその製造方法
KR100456691B1 (ko) * 2002-03-05 2004-11-10 삼성전자주식회사 이중격리구조를 갖는 반도체 소자 및 그 제조방법
JP5684450B2 (ja) * 2008-08-20 2015-03-11 ラピスセミコンダクタ株式会社 半導体装置及びその製造方法
JP2012114401A (ja) * 2010-11-05 2012-06-14 Sharp Corp 半導体装置およびその製造方法
US9793153B2 (en) * 2011-09-20 2017-10-17 Alpha And Omega Semiconductor Incorporated Low cost and mask reduction method for high voltage devices

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NL6815286A (en]) * 1967-10-28 1969-05-01
IT947674B (it) * 1971-04-28 1973-05-30 Ibm Tecnica di diffusione epitassiale per la fabbricazione di transisto ri bipolari e transistori fet
NL160988C (nl) * 1971-06-08 1979-12-17 Philips Nv Halfgeleiderinrichting met een halfgeleiderlichaam, be- vattende ten minste een eerste veldeffecttransistor met geisoleerde stuurelektrode en werkwijze voor de vervaar- diging van de halfgeleiderinrichting.
CA997869A (en) * 1973-04-12 1976-09-28 Intersil Floating body mosfet
US4002511A (en) * 1975-04-16 1977-01-11 Ibm Corporation Method for forming masks comprising silicon nitride and novel mask structures produced thereby
JPS5286083A (en) * 1976-01-12 1977-07-16 Hitachi Ltd Production of complimentary isolation gate field effect transistor
FR2358748A1 (fr) * 1976-07-15 1978-02-10 Radiotechnique Compelec Procede d'autoalignement des elements d'un dispositif semi-conducteur et dispositif realise suivant ce procede
JPS53149772A (en) * 1977-06-01 1978-12-27 Matsushita Electric Ind Co Ltd Semiconductor integrated-circuit device and its manufacture
US4225877A (en) * 1978-09-05 1980-09-30 Sprague Electric Company Integrated circuit with C-Mos logic, and a bipolar driver with polysilicon resistors
US4168997A (en) * 1978-10-10 1979-09-25 National Semiconductor Corporation Method for making integrated circuit transistors with isolation and substrate connected collectors utilizing simultaneous outdiffusion to convert an epitaxial layer
GB2043337B (en) * 1978-12-06 1983-01-26 Toko Inc Semiconductor integrated circuit devices
US4403395A (en) * 1979-02-15 1983-09-13 Texas Instruments Incorporated Monolithic integration of logic, control and high voltage interface circuitry
JPS55151349A (en) * 1979-05-15 1980-11-25 Matsushita Electronics Corp Forming method of insulation isolating region
JPS567463A (en) * 1979-06-29 1981-01-26 Hitachi Ltd Semiconductor device and its manufacture
US4346512A (en) * 1980-05-05 1982-08-31 Raytheon Company Integrated circuit manufacturing method
US4362574A (en) * 1980-07-09 1982-12-07 Raytheon Company Integrated circuit and manufacturing method
JPS5775453A (en) * 1980-10-29 1982-05-12 Fujitsu Ltd Semiconductor device and manufacture thereof
US4445268A (en) * 1981-02-14 1984-05-01 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor integrated circuit BI-MOS device
JPS5851561A (ja) * 1981-09-24 1983-03-26 Hitachi Ltd 半導体集積回路装置
JPS5994861A (ja) * 1982-11-24 1984-05-31 Hitachi Ltd 半導体集積回路装置及びその製造方法

Also Published As

Publication number Publication date
GB2128024B (en) 1986-01-02
DE3334337A1 (de) 1984-03-29
FR2533751A1 (fr) 1984-03-30
MY8700610A (en) 1987-12-31
KR920001403B1 (ko) 1992-02-13
KR840005926A (ko) 1984-11-19
HK71087A (en) 1987-10-09
SG36887G (en) 1987-09-18
GB8324163D0 (en) 1983-10-12
FR2533751B1 (fr) 1988-11-10
IT1168294B (it) 1987-05-20
GB2128024A (en) 1984-04-18
US4529456A (en) 1985-07-16
JPS5955052A (ja) 1984-03-29
IT8322983A0 (it) 1983-09-23

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